Modification of Mechanical Properties of Silicon Nanocantilevers by Self-ion Implantation
The modification of Young's modulus of silicon 3D nanostructures were studied using self-ion implantation at liquid nitrogen temperatures. The Young's modulus of the silicon nanostructres were produced by the implantation of nanoscale beams with Si ions at energies of 100 and 35 keV and dose of 1×10 15 ions/cm 2. It was observed that the Young's modulus of the bimaterial silicon nanostructures were 150.3 and the modulus of amorphous silicon nanostructures were 134.5 GPa. The results show that...[Show more]
|Collections||ANU Research Publications|
|Source:||Applied Physics Letters|
Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.