Skip navigation
Skip navigation

Implant Isolation of AlGaAs Multilayer DBR

Coelho, A V P; Boudinov, H; Lippen, T V; Tan, Hoe Hark; Jagadish, Chennupati


AlGaAs distributed Bragg reflector (DBR) structures isolation by proton irradiation was studied. The evolution of n- and p-type DBR structures lateral sheet resistance with the irradiated proton dose was measured. The vertical isolation behavior was also

CollectionsANU Research Publications
Date published: 2004
Type: Journal article
Source: Nuclear Instruments and Methods in Physics Research: Section B
DOI: 10.1016/j.nimb.2003.12.059


There are no files associated with this item.

Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.

Updated:  20 July 2017/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator