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Implant Isolation of AlGaAs Multilayer DBR

Coelho, A V P; Boudinov, H; Lippen, T V; Jagadish, Chennupati; Tan, Hark Hoe

Description

AlGaAs distributed Bragg reflector (DBR) structures isolation by proton irradiation was studied. The evolution of n- and p-type DBR structures lateral sheet resistance with the irradiated proton dose was measured. The vertical isolation behavior was also

CollectionsANU Research Publications
Date published: 2004
Type: Journal article
URI: http://hdl.handle.net/1885/77931
Source: Nuclear Instruments and Methods in Physics Research: Section B
DOI: 10.1016/j.nimb.2003.12.059

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