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Electron Scattering from Perfluorocyclobutane (c-C 4 F 8 )

Symul, Milica; Panajotovic, Radmila; Kitajima, M; Hoshino, Masamitsu; Tanaka, Hiroki; Buckman, Stephen

Description

The scattering of electron from perfluorocyclobutane (c-C4F 8) was reported. The role of the resonant scattering in both the elastic and vibrational cross sections was also demonstrated. An excitation function for elastic scattering and vibrational excitation of the ground electronic state of C4F8 for incident energies between 0.6 and 20 eV was measured. For elastic scattering for incident electron energies from 1.5 to 100 eV, a set of differential, integral, and momentum transfer cross...[Show more]

dc.contributor.authorSymul, Milica
dc.contributor.authorPanajotovic, Radmila
dc.contributor.authorKitajima, M
dc.contributor.authorHoshino, Masamitsu
dc.contributor.authorTanaka, Hiroki
dc.contributor.authorBuckman, Stephen
dc.date.accessioned2015-12-13T22:38:22Z
dc.date.available2015-12-13T22:38:22Z
dc.identifier.issn0021-9606
dc.identifier.urihttp://hdl.handle.net/1885/77523
dc.description.abstractThe scattering of electron from perfluorocyclobutane (c-C4F 8) was reported. The role of the resonant scattering in both the elastic and vibrational cross sections was also demonstrated. An excitation function for elastic scattering and vibrational excitation of the ground electronic state of C4F8 for incident energies between 0.6 and 20 eV was measured. For elastic scattering for incident electron energies from 1.5 to 100 eV, a set of differential, integral, and momentum transfer cross sections was provided.
dc.publisherAmerican Institute of Physics (AIP)
dc.sourceJournal of Chemical Physics
dc.subjectKeywords: Approximation theory; Electric excitation; Global warming; Ionization; Microelectronics; Paraffins; Parameter estimation; Plasma etching; Silica; Spectrometers; Boltzmann analysis; Born approximation; Cross sections; Perfluorocyclobutane; Vibrational exci
dc.titleElectron Scattering from Perfluorocyclobutane (c-C 4 F 8 )
dc.typeJournal article
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.citationvolume121
dc.date.issued2004
local.identifier.absfor020201 - Atomic and Molecular Physics
local.identifier.ariespublicationMigratedxPub6370
local.type.statusPublished Version
local.contributor.affiliationSymul, Milica, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationPanajotovic, Radmila, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationKitajima, M, Sophia University
local.contributor.affiliationHoshino, Masamitsu, Sophia University
local.contributor.affiliationTanaka, Hiroki, Sophia University
local.contributor.affiliationBuckman, Stephen, College of Physical and Mathematical Sciences, ANU
local.bibliographicCitation.issue11
local.bibliographicCitation.startpage5272
local.bibliographicCitation.lastpage5280
local.identifier.doi10.1063/1.1782174
dc.date.updated2015-12-11T09:43:25Z
local.identifier.scopusID2-s2.0-4944255323
CollectionsANU Research Publications

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