Collisionless expansion of pulsed rf plasmas
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Schröder, T; Grulke, O; Klinger, Thomas; Boswell, Roderick; Charles, Christine
Description
This paper presents experimental results of the quasi isothermal expansion of a pulsed rf argon plasma (Prf ≈ 300 W) into a vacuum like environment. A fast (τopen < 200 μs) gas puffing system prevents significant ionization by energetic electron in
Collections | ANU Research Publications |
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Date published: | 2014 |
Type: | Journal article |
URI: | http://hdl.handle.net/1885/77407 |
Source: | Journal of Physics D: Applied Physics |
DOI: | 10.1088/0022-3727/47/5/055207 |
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01_Schröder_Collisionless_expansion_of_2014.pdf | 2.3 MB | Adobe PDF | Request a copy |
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