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Collisionless expansion of pulsed rf plasmas

Schröder, T; Grulke, O; Klinger, Thomas; Boswell, Roderick; Charles, Christine

Description

This paper presents experimental results of the quasi isothermal expansion of a pulsed rf argon plasma (Prf ≈ 300 W) into a vacuum like environment. A fast (τopen < 200 μs) gas puffing system prevents significant ionization by energetic electron in

CollectionsANU Research Publications
Date published: 2014
Type: Journal article
URI: http://hdl.handle.net/1885/77407
Source: Journal of Physics D: Applied Physics
DOI: 10.1088/0022-3727/47/5/055207

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