Electron-beam patterning of polymer electrolyte films to make multiple nanoscale gates for nanowire transistors
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Carrad, D. J.; Burke, Adam M.; Lyttleton, R. W.; Joyce, Hannah J; Jagadish, Chennupati; Storm, Kristian; Linke, Heiner; Samuelson, Lars; Micolich, Adam Paul; Tan, Hark Hoe
Description
We report an electron-beam based method for the nanoscale patterning of the poly(ethylene oxide)/LiClO4 polymer electrolyte. We use the patterned polymer electrolyte as a high capacitance gate dielectric in single nanowire transistors and obtain subthresh
| Collections | ANU Research Publications |
|---|---|
| Date published: | 2014 |
| Type: | Journal article |
| URI: | http://hdl.handle.net/1885/77398 |
| Source: | Nano Letters |
| DOI: | 10.1021/nl403299u |
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| File | Description | Size | Format | Image |
|---|---|---|---|---|
| 01_Carrad_Electron-beam_patterning_of_2014.pdf | 2.46 MB | Adobe PDF | Request a copy |
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