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Electron-beam patterning of polymer electrolyte films to make multiple nanoscale gates for nanowire transistors

Carrad, D. J.; Burke, Adam M.; Lyttleton, R. W.; Joyce, Hannah J; Jagadish, Chennupati; Storm, Kristian; Linke, Heiner; Samuelson, Lars; Micolich, Adam Paul; Tan, Hark Hoe


We report an electron-beam based method for the nanoscale patterning of the poly(ethylene oxide)/LiClO4 polymer electrolyte. We use the patterned polymer electrolyte as a high capacitance gate dielectric in single nanowire transistors and obtain subthresh

CollectionsANU Research Publications
Date published: 2014
Type: Journal article
Source: Nano Letters
DOI: 10.1021/nl403299u


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