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The Potential of Ion Beam Techniques for the Development of Indium Nitride

Timmers, Heiko; Shrestha, Santosh K; Byrne, Aidan


Several types of indium nitride films presently available have been studied with ion beam techniques including Elastic Recoil Detection (ERD) analysis and radioisotope implantation combined with Perturbed Angular Correlation spectroscopy. Severe beam-induced effusion of nitrogen during ERD analysis can successfully be modelled and accurate compositional information is obtained. All types of films analysed are nitrogen-rich. Perturbed Angular Correlation spectroscopy has been demonstrated to be...[Show more]

CollectionsANU Research Publications
Date published: 2004
Type: Journal article
Source: Journal of Crystal Growth
DOI: 10.1016/j.jcrysgro.2004.05.033


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