Sio, Hang Cheong (Kelvin); Phang, Sieu Pheng; Trupke, T; MacDonald, Daniel
We present a method for converting photoluminescence images into carrier lifetime images for silicon wafers with inhomogeneous lifetime distributions, such as multi-crystalline silicon wafers, based on a calibration factor extracted from a separate, homogeneous, mono-crystalline calibration wafer and simple optical modelling of the photoluminescence signal from both the calibration wafer and the test wafer. The method is applicable to planar wafers with uniform carrier profiles depth-wise. A...[Show more]
Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.