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An experimental and analytical study of an asymmetric capacitively coupled plasma used for plasma polymerization

Michelmore, Andrew; Whittle, Jason D; Short, Rob; Boswell, Roderick; Charles, Christine


Plasma processing is widely used to provide novel surface modifications to materials for a variety of applications. Typically, the systems used to carry out these modifications are poorly characterised. Here we describe the basics of a global model for a

CollectionsANU Research Publications
Date published: 2014
Type: Journal article
Source: Plasma Processes and Polymers
DOI: 10.1002/ppap.201400026


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