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The influence of thermal effects and dielectric films on the electronic quality of p+-doped silicon processed by nanosecond laser

Xu, Lujia; Weber, Klaus; Fell, Andreas; Yang, Xinbo; Franklin, Evan; Thomson, Andrew


Laser doping of silicon is a complex process involving thermal effects and interactions between different materials far from equilibrium and over a short period. In this paper, diffused samples capped with different dielectric films (including bare surfaces) are processed using laser pulses of 20-400 ns duration and characterized by photoluminescence (PL) imaging to study the degradation of the electronic properties of the processed regions. This way, without the interference of a dopant...[Show more]

CollectionsANU Research Publications
Date published: 2014
Type: Journal article
Source: IEEE Journal of Photovoltaics
DOI: 10.1109/JPHOTOV.2014.2330416


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