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On the surface passivation of textured C-Si by PECVD silicon nitride

Wan, Yimao; McIntosh, Keith


We investigate the surface passivation of crystalline silicon (c-Si) wafers that are textured with random upright pyramids and passivated with amorphous silicon nitride (SiNx ). Over a large range of refractive indices (n = 1.89-4.1 at 632 nm), we achieve

CollectionsANU Research Publications
Date published: 2013
Type: Journal article
Source: IEEE Journal of Photovoltaics
DOI: 10.1109/JPHOTOV.2013.2271832


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