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Defining plasma polymerization: New insight into what we should be measuring

Michelmore, Andrew; Charles, Christine; Boswell, Roderick; Short, Rob; Whittle, Jason D

Description

External parameters (RF power and precursor flow rate) are typically quoted to define plasma polymerization experiments. Utilizing a parallel-plate electrode reactor with variable geometry, it is shown that these parameters cannot be transferred to reacto

CollectionsANU Research Publications
Date published: 2013
Type: Journal article
URI: http://hdl.handle.net/1885/74529
Source: ACS Applied Materials and Interfaces
DOI: 10.1021/am401484b

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