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Amorphous (In 2 O 3 ) x (Ga 2 O 3 ) y (ZnO) 1-x-y thin films with high mobility fabricated by pulsed laser deposition

Su, Xueqiong; Wang, Li; Sun, Rui; Bao, Chuancheng; Lu, Yi; Wang, Rongping

Description

We prepared a series of (In2O3)x(Ga 2O3)y(ZnO)1-x-y (0.7 ≤ x ≤ 0.8, 0.05 ≤ y ≤ 0.15) (IGZO) thin films using the pulsed laser deposition (PLD) method at room temperature under same oxygen pressure. The structural, optical and electrical properties

CollectionsANU Research Publications
Date published: 2013
Type: Journal article
URI: http://hdl.handle.net/1885/74013
Source: Applied Surface Science
DOI: 10.1016/j.apsusc.2013.06.036

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