Low cost nanoimprinted polymer waveguides
We report here on the use of nanoimprint technologyto fabricate low cost planar waveguides in a Polysiloxane polymer system capable of passing the stringent Telcordia environmental and reliability criteria. Low loss buried channel waveguides with core cross sections of 3x3 microns and a 2% refractive index contrast were fabricated on bare silicon wafers with a simple and fast four step process using a 100mm diameter Polydimethylsiloxane (PDMS) stamp. The waveguides were patterned using an...[Show more]
|Collections||ANU Research Publications|
|Source:||Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD|
|01_Han_Low_cost_nanoimprinted_polymer_2008.pdf||619.03 kB||Adobe PDF||Request a copy|
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