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Low cost nanoimprinted polymer waveguides

Han, Ting; Madden, Steve; Zhang, Yang; Charters, Robbie; Luther-Davies, Barry


We report here on the use of nanoimprint technologyto fabricate low cost planar waveguides in a Polysiloxane polymer system capable of passing the stringent Telcordia environmental and reliability criteria. Low loss buried channel waveguides with core cross sections of 3x3 microns and a 2% refractive index contrast were fabricated on bare silicon wafers with a simple and fast four step process using a 100mm diameter Polydimethylsiloxane (PDMS) stamp. The waveguides were patterned using an...[Show more]

CollectionsANU Research Publications
Date published: 2008
Type: Conference paper
Source: Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD
DOI: 10.1109/COMMAD.2008.4802122


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