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GISAXS Studies of Structural Modifications in Ion-beam Amorphized Ge

Desnica-Frankovic, I D; Dubcek, P; Desnica, U V; Bernstorff, S; Ridgway, Mark C; Glover, Christopher


Grazing incidence small angle scattering of X-rays (GISAXS) was used to analyze structural modifications in implantation-damaged Ge. Samples were implanted by different doses of 74Ge, from 3 × 1012 cm-2 to 3 × 1016 cm-2; at room- or liquid nitrogen-temp

CollectionsANU Research Publications
Date published: 2006
Type: Journal article
Source: Nuclear Instruments and Methods in Physics Research: Section B
DOI: 10.1016/j.nimb.2006.03.093


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