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Ion-beam-produced Damage and its Stability in AIN Films

Kucheyev, Sergei; Williams, James; Zou, Jin; Jagadish, Chennupati; Pophristic, M; Guo, S; Ferguson, I T; Manasreh, M O

Description

Structural characteristics of single-crystal wurtzite AlN epilayers (grown on sapphire substrates) bombarded with 300 keV197Au+ ions at room and liquid-nitrogen temperatures (RT and LN2) are studied by a combination of Rutherford backscattering/channeling spectrometry and cross-sectional transmission electron microscopy. Results reveal extremely strong dynamic annealing of ion-beam-generated defects in AlN. Lattice amorphization is not observed even for very large doses of keV heavy ions at...[Show more]

CollectionsANU Research Publications
Date published: 2002
Type: Journal article
URI: http://hdl.handle.net/1885/71928
Source: Journal of Applied Physics
DOI: 10.1063/1.1501746

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