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Local digital etching and infiltration for tuning of a H1- Cavity in deeply etched InP/InGaAsP/InP photonic crystals

Kicken, H H J E; Alkemade, P.F.A.; van der Heijden, Rob W.; Karouta, Fouad; Nötzel, Richard; van der Drift, E.; Salemink, H W M


Local post-production processing of single holes in a planar photonic crystal is demonstrated by selectively opening a masking layer by focused ion beam milling. Local tuning was optically demonstrated by both blueshifting and subsequent red-shifting the

CollectionsANU Research Publications
Date published: 2009
Type: Conference paper
Source: Conference Proceedings - International Conference on Indium Phosphide and Related Materials
DOI: 10.1109/ICIPRM.2009.5012419


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