Platinum Atom Location on the Internal Walls of Nanocavities Investigated by Ion Channeling Analysis
Atomic locations of Pt trapped at hydrogen-induced cavities in Si have been investigated by ion channeling analysis. A Pt dose of 1 × 1014 cm-2, corresponding to a monolayer coverage of the internal walls of cavities, was implanted into cavity-containing
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|Source:||Nuclear Instruments and Methods in Physics Research: Section B|
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