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Platinum Atom Location on the Internal Walls of Nanocavities Investigated by Ion Channeling Analysis

Kinomura, Atsushi; Williams, James; Tsubouchi, N; Horino, Y.

Description

Atomic locations of Pt trapped at hydrogen-induced cavities in Si have been investigated by ion channeling analysis. A Pt dose of 1 × 1014 cm-2, corresponding to a monolayer coverage of the internal walls of cavities, was implanted into cavity-containing

CollectionsANU Research Publications
Date published: 2002
Type: Journal article
URI: http://hdl.handle.net/1885/71693
Source: Nuclear Instruments and Methods in Physics Research: Section B
DOI: 10.1016/S0168-583X(01)01219-8

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