Skip navigation
Skip navigation

Platinum Atom Location on the Internal Walls of Nanocavities Investigated by Ion Channeling Analysis

Kinomura, Atsushi; Williams, James; Tsubouchi, N; Horino, Y.


Atomic locations of Pt trapped at hydrogen-induced cavities in Si have been investigated by ion channeling analysis. A Pt dose of 1 × 1014 cm-2, corresponding to a monolayer coverage of the internal walls of cavities, was implanted into cavity-containing

CollectionsANU Research Publications
Date published: 2002
Type: Journal article
Source: Nuclear Instruments and Methods in Physics Research: Section B
DOI: 10.1016/S0168-583X(01)01219-8


File Description SizeFormat Image
01_Kinomura_Platinum_Atom_Location_on_the_2002.pdf96.4 kBAdobe PDF    Request a copy

Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.

Updated:  12 November 2018/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator