NEXAFS spectroscopy of CVD diamond films exposed to fusion relevant hydrogen plasma

Abstract

A series of CVD diamond films have been exposed to hydrogen plasma in the linear magnetized plasma device, MAGPIE, with various applied sample stage biases between 0 V (no applied bias) to - 500 V. The plasma-induced damage to the surface structure of the diamond films has been investigated by Near Edge X-ray Absorption Fine Structure (NEXAFS) spectroscopy in both the Auger electron yield (AEY) and total fluorescence yield (TFY) modes. The key diamond NEXAFS spectral features (diamond core exciton and second absolute band gap) are found to be diminished following plasma exposure as measured in the surface sensitive, AEY spectra, whilst these features remain unchanged relative to an unexposed diamond reference film as measured using the bulk sensitive, TFY spectra. These results, in conjunction with SRIM simulations, show definitively that the damage to the surface of the diamond films is restricted to the scale of the penetration depth of the H ions and no damage is induced at greater depths. The power and sensitivity of NEXAFS spectroscopy in assessing damage to the surface of diamond from fusion-relevant plasma-surface interactions are demonstrated.