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Hybrid high-resolution three-dimensional nanofabrication for metamaterials and nanoplasmonics

Staude, Isabelle; Decker, Manuel; Ventura, Michael James; Jagadish, Chennupati; Neshev, Dragomir; Gu, Min; Kivshar, Yuri


We propose a novel hybrid fabrication approach that combines direct laser writing with a subsequent electron-beam lithography step. This approach allows realizing out-of-plane plasmonic nanostructures with truly nanoscopic feature sizes. The excellent quality of the obtained structures is evidenced by optical characterization of upright-standing split-ring resonator arrays fabricated along these lines.

CollectionsANU Research Publications
Date published: 2013
Type: Journal article
Source: Advanced Materials
DOI: 10.1002/adma.201203564


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