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Photo-induced and thermal annealing of chalcogenide films for waveguide fabrication

Choi, Duk-Yong; Wade, Andrew; Madden, Steve; Wang, Rongping; Bulla, Douglas; Luther-Davies, Barry


We describe the effect of light-induced annealing of As2S 3 thin films and its impact on the performance of an optical waveguide. An as-deposited film was subjected to illumination with band-edge light before being used to fabricate submicron thick waveguides using photolithography and dry plasma etching. Studies of the film microstructure revealed a difference between the atomic bonds and linked phases between the as-deposited, the thermally-annealed, and the optically-annealed films. Although...[Show more]

CollectionsANU Research Publications
Date published: 2013
Type: Journal article
Source: Physics Procedia
DOI: 10.1016/j.phpro.2013.07.032


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