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Pulsed laser deposited InGaZnO thin film on silica glass

Chen, Jiangbo; Wang, Li; Su, Xueqiong; Wang, Rongping


High purity Ga2O3, In2O3, and ZnO powders were weighted at a molar ratio of 1: 8: 1, and then InGaZnO (IGZO) ceramic target was fabricated by conventional solid state reaction method in air. IGZO thin films were subsequently prepared by pulsed laser deposition (PLD) method under different pressures at room temperature. The structural and physical properties of the as-grown films were diagnosed by various tools. It was confirmed that all the films exhibited amorphous structure. With the increase...[Show more]

CollectionsANU Research Publications
Date published: 2012
Type: Journal article
Source: Journal of Non-crystalline Solids
DOI: 10.1016/j.jnoncrysol.2011.12.039


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