Wang, Guoxiang; Chen, Yimin; Shen, Xiang; Li, Junjian; Wang, Rongping; Lu, Yegang; Dai, Shixun; Xu, Tiefeng; Nie, Qiuhua
(ZnO)x(Sb2Te3)1-x materials with different ZnO contents have been systemically studied with an aim of finding the most suitable composition for phase change memory applications. It was found that ZnO-doping could improve thermal stability and electrical behavior of Sb2Te3 film. Sb2Te3-rich nanocrystals, surrounded by ZnO-rich amorphous phases, were observed in annealed ZnO-doped Sb2Te3 composite films, and the segregated domains exhibited a relatively uniform distribution. The ZnO-doped Sb2Te3...[Show more]
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