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Analysis of fracture behavior of thin polycrystalline diamond films

Li, Duosheng; Zuo, Dunwen; Qin, Qing Hua

Description

The effect of the substrate temperature and CH4 concentrations on the fracture behavior of thin polycrystalline diamond films was systematically investigated by X-ray diffraction and scanning electron microscopy. The results show that the fracture behavior of thin polycrystalline diamond films synthesized by direct current plasma jet chemical vapor deposition is closely related to the substrate temperature and CH4 concentrations. A high substrate temperature, due to difference in the thermal...[Show more]

CollectionsANU Research Publications
Date published: 2014
Type: Journal article
URI: http://hdl.handle.net/1885/70768
Source: Strength of Materials
DOI: 10.1007/s11223-014-9532-z

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