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Temperature-dependent mechanical deformation of silicon at the nanoscale: Phase transformation versus defect propagation

Mangalampalli, S.R.N. Kiran; Tran, Tuan; Smillie, Lachlan; Haberl, Bianca; Subianto, Denny; Williams, James; Bradby, Jodie

Description

This study uses high-temperature nanoindentation coupled with in situ electrical measurements to investigate the temperature dependence (25-200°C) of the phase transformation behavior of diamond cubic (dc) silicon at the nanoscale. Along with in situ ind

CollectionsANU Research Publications
Date published: 2015
Type: Journal article
URI: http://hdl.handle.net/1885/70493
Source: Journal of Applied Physics
DOI: 10.1063/1.4921534

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