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Characterisation and optimisation of PECVD SiNx as an antireflection coating and passivation layer for silicon solar cells

Wan, Yimao; McIntosh, Keith R.; Thomson, Andrew F.


In this work, we investigate how the film properties of silicon nitride (SiNx) depend on its deposition conditions when formed by plasma enhanced chemical vapour deposition (PECVD). The examination is conducted with a Roth & Rau AK400 PECVD reactor, where the varied parameters are deposition temperature, pressure, gas flow ratio, total gas flow, microwave plasma power and radio-frequency bias voltage. The films are evaluated by Fourier transform infrared spectroscopy to determine structural...[Show more]

CollectionsANU Research Publications
Date published: 2013-03-05
Type: Journal article
Source: AIP Advances
DOI: 10.1063/1.4795108


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