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Temperature dependent deformation mechanisms in pure amorphous silicon

Mangalampalli, S.R.N. Kiran; Haberl, Bianca; Williams, James; Bradby, Jodie


High temperature nanoindentation has been performed on pure ion-implanted amorphous silicon (unrelaxed a-Si) and structurally relaxed a-Si to investigate the temperature dependence of mechanical deformation, including pressure-induced phase transformations. Along with the indentation load-depth curves, ex situ measurements such as Raman micro-spectroscopy and cross-sectional transmission electron microscopy analysis on the residual indents reveal the mode of deformation under the indenter....[Show more]

CollectionsANU Research Publications
Date published: 2014
Type: Journal article
Source: Journal of Applied Physics
DOI: 10.1063/1.4869136


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