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Precipitation of iron in multicrystalline silicon during annealing

Liu, An Yao; MacDonald, Daniel


In this paper, the precipitation kinetics of iron in multicrystalline silicon during moderate temperature annealing are systematically studied with respect to annealing time, temperature, iron super-saturation level, and different types and densities of precipitation sites. The quantitative analysis is based on examining the changes in the concentrations and distributions of interstitial iron in multicrystalline silicon wafers after annealing at 400-700°C. This is achieved by using the...[Show more]

CollectionsANU Research Publications
Date published: 2014
Type: Journal article
Source: Journal of Applied Physics
DOI: 10.1063/1.4868587
Access Rights: Open Access


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