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The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell

Xu, Lujia; Weber, Klaus; Phang, Sieu Pheng; Hamieri, Ziv; Franklin, Evan; Fell, Andreas

Description

Laser doping of semiconductors has been the subject of intense research over the past decades. Previous work indicates that the use of SiO 2/SiN \rm x stacks instead of a single dielectric film as the anti-reflection coating and passivation layer results

CollectionsANU Research Publications
Date published: 2014
Type: Journal article
URI: http://hdl.handle.net/1885/69769
Source: IEEE Journal of Photovoltaics
DOI: 10.1109/JPHOTOV.2014.2298097

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