The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell
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Xu, Lujia; Weber, Klaus; Phang, Sieu Pheng; Hamieri, Ziv; Franklin, Evan; Fell, Andreas
Description
Laser doping of semiconductors has been the subject of intense research over the past decades. Previous work indicates that the use of SiO 2/SiN \rm x stacks instead of a single dielectric film as the anti-reflection coating and passivation layer results
| Collections | ANU Research Publications |
|---|---|
| Date published: | 2014 |
| Type: | Journal article |
| URI: | http://hdl.handle.net/1885/69769 |
| Source: | IEEE Journal of Photovoltaics |
| DOI: | 10.1109/JPHOTOV.2014.2298097 |
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| File | Description | Size | Format | Image |
|---|---|---|---|---|
| 01_Xu_The_impact_of_SiO2/SiN\rm_x_2014.pdf | 556.8 kB | Adobe PDF | Request a copy |
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