Sprouster, David; Ruffell, Simon; Bradby, Jodie; Stauffer, D.D.; Major, R C; Warren, O L; Williams, James
The electromechanical properties of metallic and semiconductor materials are investigated in situ using hard, electrically conductive, vanadium carbide Berkovich tips fitted to a nanoindenter. We demonstrate that, for tip contact radii from 100 nm up to about 1 μm, quantitative electrical data can be successfully obtained from the through-tip resistive measurements simultaneously with mechanical measurements. We outline a procedure for measuring the various resistive components of the...[Show more]
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