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Optical and structural properties of Ge-Sb-Se thin films fabricated by sputtering and thermal evaporation

Chen, Yu; Shen, Xiang; Wang, Rongping; Wang, Guoxiang; Dai, Shixun; Xu, Tiefeng; Nie, Qiuhua

Description

We deposited Ge28Sb12Se60 chalcogenide films using either thermal evaporation or radio-frequency magnetron sputtering techniques, and then measured their structural and optical properties using various diagnosis tools. The refractive indices of the films

CollectionsANU Research Publications
Date published: 2013
Type: Journal article
URI: http://hdl.handle.net/1885/69645
Source: Journal of Alloys and Compounds
DOI: 10.1016/j.jallcom.2012.09.043

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