Skip navigation
Skip navigation

Tellurium oxide thin film waveguides for integrated photonics

Vu, Khu; Madden, Steve

Description

We report the fabrication of Tellurium oxide films with deposited propagation losses that are sufficiently low to allow the fabrication of high quality planar integrated optical devices. Stoichiometric low loss films were produced by reactive magnetron RF sputtering and the effect of a wide range of sputtering parameters on stoichiometry, refractive index, Raman spectra and optical loss of thin films were investigated. As deposited TeO2 films with propagation losses below 0.1 dB/cm at 1550nm...[Show more]

dc.contributor.authorVu, Khu
dc.contributor.authorMadden, Steve
dc.coverage.spatialCairns Australia
dc.date.accessioned2015-12-10T23:33:06Z
dc.date.available2015-12-10T23:33:06Z
dc.date.createdJuly 10-14 2011
dc.identifier.isbn9781118273746
dc.identifier.urihttp://hdl.handle.net/1885/69146
dc.description.abstractWe report the fabrication of Tellurium oxide films with deposited propagation losses that are sufficiently low to allow the fabrication of high quality planar integrated optical devices. Stoichiometric low loss films were produced by reactive magnetron RF sputtering and the effect of a wide range of sputtering parameters on stoichiometry, refractive index, Raman spectra and optical loss of thin films were investigated. As deposited TeO2 films with propagation losses below 0.1 dB/cm at 1550nm have been achieved which are therefore well suited for integrated optical applications.
dc.publisherConference Organising Committee
dc.relation.ispartofseriesInternational Conference on Advances in the Fusion and Processing of Glass and Symposium 15 - Structure, Properties and Photonic Applications of Glasses AFPG-9
dc.sourceCeramic Transactions
dc.subjectKeywords: High quality; Integrated optical devices; Integrated photonics; Optical applications; Propagation loss; Rf-sputtering; Sputtering parameters; Tellurium oxide; Tellurium oxide films; Integrated optics; Optical glass; Oxide films; Photonics; Refractive inde
dc.titleTellurium oxide thin film waveguides for integrated photonics
dc.typeConference paper
local.description.notesImported from ARIES
dc.date.issued2012
local.identifier.absfor020500 - OPTICAL PHYSICS
local.identifier.ariespublicationf5625xPUB1934
local.type.statusPublished Version
local.contributor.affiliationVu, Khu, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationMadden, Steve, College of Physical and Mathematical Sciences, ANU
local.bibliographicCitation.startpage181
local.bibliographicCitation.lastpage186
local.identifier.doi10.1002/9781118472590.ch21
dc.date.updated2016-02-24T08:51:56Z
local.identifier.scopusID2-s2.0-84866444420
CollectionsANU Research Publications

Download

There are no files associated with this item.


Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.

Updated:  19 May 2020/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator