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Formation of ordered arrays of gold particles by nanoindentation templating

Wong, Sherman; Shalav, Avi; Ruffell, Simon; Bradby, Jodie; Field, M. R.; McCulloch, Dougal G; Elliman, Robert

Description

Ordered arrays of gold-rich particles, with diameters ranging from 50 nm to 180 nm, have been formed on a silicon (100) surface through pre-patterning by nanoindentation. Indentation and gold deposition of the sample is followed by thermal processing, causing the gold to become trapped at the indentation sites. We suggest that gold trapping is via an alloying process with the underlying Si substrate where the native oxide is structurally compromised by the indentation process. The final size...[Show more]

CollectionsANU Research Publications
Date published: 2014
Type: Journal article
URI: http://hdl.handle.net/1885/68897
Source: Physica Status Solidi: Rapid Research Letters
DOI: 10.1002/pssr.201308156

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