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Mechanical Properties of As-Grown and Ion-Beam-Modified GaN Films

Kucheyev, Sergei; Bradby, Jodie; Williams, James; Swain, Michael Vincent; Toth, M; Phillips, Matthew R; Jagadish, Chennupati


The deformation behavior of as-grown and ion-beam-modified wurtzite GaN films is studied by nanoindentation with a spherical indenter. Atomic force microscopy (AFM) and cathodoluminescence are used to characterize the deformation mode. No systematic dependence of the mechanical properties on the film thickness (at least for thicknesses from 1.8 to 4 μm) as well as on doping type is observed. Results strongly suggest that (i) slips is the major contributor to the plastic deformation of...[Show more]

CollectionsANU Research Publications
Date published: 2001
Type: Conference paper
Source: Materials Research Society Symposium Proceedings vol 647: Ion Beam Synthesis and Processing of Advanced Materials


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