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Self-Ion-induced Swelling of Germanium

Stritzker, B; Elliman, Robert; Zou, Jin


Ge substrates of (100) orientation were irradiated with 1.0 MeV Ge ions at temperatures in the range from -180°C to 500°C. Pronounced swelling of the irradiated material up to 4000 Å, associated with the formation of a porous surface layer, was evident

CollectionsANU Research Publications
Date published: 2001
Type: Journal article
Source: Nuclear Instruments and Methods in Physics Research: Section B
DOI: 10.1016/S0168-583X(00)00597-8


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