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High-dose ion implantation into GaN

Kucheyev, Sergei; Williams, James; Zou, Jin; Jagadish, Chennupati; Li, Gang


The structural characteristics of wurtzite GaN films bombarded up to high ion doses are studied by a combination of Rutherford backscattering/channeling spectrometry, transmission electron microscopy, and atomic force microscopy. We concentrate on (i) the nature of structural disorder and the consequences of anomalous erosion observed in GaN exposed to ion bombardment at elevated temperatures and (ii) correlation between surface roughness and the development of a porous structure during...[Show more]

CollectionsANU Research Publications
Date published: 2001
Type: Journal article
Source: Nuclear Instruments and Methods in Physics Research: Section B
DOI: 10.1016/S0168-583X(00)00672-8


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