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Ion-beam-induced reconstruction of amorphous GaN

Kucheyev, Sergei; Williams, James; Zou, Jin; Bradby, Jodie; Jagadish, Chennupati; Li, Gang


Wurtzite GaN can be rendered amorphous by high-dose heavy-ion bombardment. We show here that relatively low-dose reirradiation of such amorphous GaN (a-GaN) with MeV light ions can significantly change some of the physical properties of a-GaN. In particular, light-ion reirradiation of a-GaN results in (i) an increase in material density, (ii) the suppression of complete decomposition during postimplantation annealing, (iii) a significant increase in the values of hardness and Young's modulus,...[Show more]

CollectionsANU Research Publications
Date published: 2001
Type: Journal article
Source: Physical Review B


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