Fu, Lan; Tan, Hoe Hark; Jagadish, Chennupati; Li, Na; Li, Ning; Liu, Qiu Xiang; Lu, Wei; Shen, S C
Proton implantation followed by rapid thermal annealing was used to tune the spectral response of the quantum-well infrared photodetectors (QWIPs). Various implantation schemes, such as single low energy implantation, multiple energy implantation, and single high energy implantation were compared for tuning the wavelength of QWIPs. Large redshift of the QWIPs' response wavelength with either narrowed or broadened spectrum was obtained after interdiffusion. Comparatively, the single high energy...[Show more]
Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.