Tuning of detection wavelength of quantum-well infrared photodetectors by quantum-well intermixing
Proton implantation followed by rapid thermal annealing was used to tune the spectral response of the quantum-well infrared photodetectors (QWIPs). Various implantation schemes, such as single low energy implantation, multiple energy implantation, and single high energy implantation were compared for tuning the wavelength of QWIPs. Large redshift of the QWIPs' response wavelength with either narrowed or broadened spectrum was obtained after interdiffusion. Comparatively, the single high energy...[Show more]
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|Source:||Infrared Physics and Technology|
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