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Mechanical Deformation in Silicon by Micro-indentation

Bradby, Jodie; Williams, James; Wong-Leung, Jennifer; Swain, Michael Vincent; Munroe, Paul


The mechanical deformation of crystalline silicon induced by micro-indentation has been studied. Indentations were made using a variety of loading conditions. The effects on the final deformation microstructure of the load-unload rates and both spherical

CollectionsANU Research Publications
Date published: 2001
Type: Journal article
Source: Journal of Materials Research


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