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Effect of Stress on Impurity-free quantum well intermixing

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Deenapanray, Prakash; Jagadish, Chennupati

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Impurity-free interdiffusion of GaAs/AlGaAs quantum wells was investigated for SiOx capping layers grown by plasma-enhanced chemical vapor deposition. Dielectric layers were deposited for various nitrous oxide flow rates, N(30 sccm ≤ N ≤ 710 sccm), wh

dc.contributor.authorDeenapanray, Prakash
dc.contributor.authorJagadish, Chennupati
dc.date.accessioned2015-12-10T23:30:41Z
dc.identifier.issn1099-0062
dc.identifier.urihttp://hdl.handle.net/1885/68290
dc.description.abstractImpurity-free interdiffusion of GaAs/AlGaAs quantum wells was investigated for SiOx capping layers grown by plasma-enhanced chemical vapor deposition. Dielectric layers were deposited for various nitrous oxide flow rates, N(30 sccm ≤ N ≤ 710 sccm), wh
dc.publisherElectrochemical Society Inc
dc.sourceElectrochemical and Solid-State Letters
dc.subjectKeywords: Chemical vapor deposition; Ellipsometry; Epitaxial growth; Fourier transform infrared spectroscopy; Heterojunctions; Impurities; Photoluminescence; Rapid thermal annealing; Rutherford backscattering spectroscopy; Semiconducting aluminum compounds; Semicon
dc.titleEffect of Stress on Impurity-free quantum well intermixing
dc.typeJournal article
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.citationvolume4
dc.date.issued2001
local.identifier.absfor020204 - Plasma Physics; Fusion Plasmas; Electrical Discharges
local.identifier.ariespublicationMigratedxPub1672
local.type.statusPublished Version
local.contributor.affiliationDeenapanray, Prakash, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationJagadish, Chennupati, College of Physical and Mathematical Sciences, ANU
local.description.embargo2037-12-31
local.bibliographicCitation.startpageG11
local.bibliographicCitation.lastpageG13
local.identifier.doi10.1149/1.1339242
dc.date.updated2015-12-10T11:09:00Z
local.identifier.scopusID2-s2.0-0035262735
CollectionsANU Research Publications

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