Efficiency of dislocations and cavities for gettering of Cu and Fe in silico
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Stritzker, B; Petravic, Mladen; Wong-Leung, Jennifer; Williams, James
Description
Dislocations (of interstitial character) as well as cavities are known for their ability to getter impurities within Si. In order to determine the relative gettering strength we produced both dislocations and cavities at different depths within (100) Si.
Collections | ANU Research Publications |
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Date published: | 2001 |
Type: | Journal article |
URI: | http://hdl.handle.net/1885/68170 |
Source: | Nuclear Instruments and Methods in Physics Research: Section B |
DOI: | 10.1016/S0168-583X(00)00610-8 |
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01_Stritzker_Efficiency_of_dislocations_and_2001.pdf | 123.39 kB | Adobe PDF | Request a copy |
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