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Efficiency of dislocations and cavities for gettering of Cu and Fe in silico

Stritzker, B; Petravic, Mladen; Wong-Leung, Jennifer; Williams, James


Dislocations (of interstitial character) as well as cavities are known for their ability to getter impurities within Si. In order to determine the relative gettering strength we produced both dislocations and cavities at different depths within (100) Si.

CollectionsANU Research Publications
Date published: 2001
Type: Journal article
Source: Nuclear Instruments and Methods in Physics Research: Section B
DOI: 10.1016/S0168-583X(00)00610-8


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