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A Robust Metal-Assisted Etching Process for Ag-Catalyzed Texturing of Silicon

Booker, Katherine; Rahman, Shakir; Chong, Teck; Mankelow, R; Weber, Klaus; Blakers, Andrew

Description

Silicon structures with excellent light-trapping performance have been developed using a silver-catalyzed metal-assisted etching (MAE) process. The MAE process can be well controlled through variation in solution composition and exposure times, even when

CollectionsANU Research Publications
Date published: 2015
Type: Journal article
URI: http://hdl.handle.net/1885/67713
Source: IEEE Journal of Photovoltaics
DOI: 10.1109/JPHOTOV.2015.2400222

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