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Preparation and nanomechanical characterisation of metal containing amorphous hydrogenated carbon nanocomposite films

Bharathy, P. Vijai; Nataraj, D.; Yang, Q.; Mangalaraj, D.; Mangalampalli, S.R.N. Kiran


The relationship between metal-induced chemical bonding and the mechanical properties of Me/a:C-H (Me-Ti and Ni) films are discussed. Nanocomposite films were deposited onto the Si substrates via biased target ion beam sputtering of metal combined with reactive ion beam deposition of a:C-H using CH4/Ar gas mixture. The chemical composition, microstructure and mechanical properties were characterized using X-ray photoelectron spectroscopy (XPS), Raman spectroscopy and nanoindentation. XPS...[Show more]

CollectionsANU Research Publications
Date published: 2010
Type: Journal article
Source: Advanced Materials Research
DOI: 10.4028/


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