Bharathy, P. Vijai; Nataraj, D.; Mangalaraj, D.; Mangalampalli, S.R.N. Kiran; Silvestre-Albero, J.; Yang, Q.
Tungsten incorporated diamond like carbon nanocomposite films were deposited onto Si substrate by using target biased ion beam assisted deposition. The effect of W target bias voltage on the chemical bonding, structure, surface morphology and mechanical properties of DLC films were investigated by means of XPS, Raman spectroscopy, AFM and Nanoindentation. It was found that the content of W in the films increased from 6 at.% to 13.7 at.% due to the increase in target bias voltage from -300 V to...[Show more]
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