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Influence of tungsten content in W-DLC nanocomposite thin films prepared by hybrid target biased ion beam assisted deposition technique

Bharathy, P. Vijai; Nataraj, D.; Mangalaraj, D.; Mangalampalli, S.R.N. Kiran; Silvestre-Albero, J.; Yang, Q.


Tungsten incorporated diamond like carbon nanocomposite films were deposited onto Si substrate by using target biased ion beam assisted deposition. The effect of W target bias voltage on the chemical bonding, structure, surface morphology and mechanical properties of DLC films were investigated by means of XPS, Raman spectroscopy, AFM and Nanoindentation. It was found that the content of W in the films increased from 6 at.% to 13.7 at.% due to the increase in target bias voltage from -300 V to...[Show more]

CollectionsANU Research Publications
Date published: 2011
Type: Journal article
Source: International Journal of Nanoscience
DOI: 10.1142/S0219581X11009295


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