Growth, surface morphology, optical properties and electrical resistivity of e-TiNx (0.4 < x = 0.5) films
The growth, structure, surface morphology, optical properties and electrical resistivity studies on TiNx (0.4 < x ≤ 0.5) films is presented. The films of thickness 116-230 nm were grown on fused silica substrates by RF magnetron sputtering in 100% pure
|Collections||ANU Research Publications|
|Source:||Applied Surface Science|
|01_Mangalampalli_Growth,_surface_morphology,_2008.pdf||1.18 MB||Adobe PDF||Request a copy|
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