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Growth, surface morphology, optical properties and electrical resistivity of e-TiNx (0.4 < x = 0.5) films

Mangalampalli, S.R.N. Kiran; Krishna, Ghanashyam; Padmanabhan, K.A.

Description

The growth, structure, surface morphology, optical properties and electrical resistivity studies on TiNx (0.4 < x ≤ 0.5) films is presented. The films of thickness 116-230 nm were grown on fused silica substrates by RF magnetron sputtering in 100% pure

CollectionsANU Research Publications
Date published: 2008
Type: Journal article
URI: http://hdl.handle.net/1885/67125
Source: Applied Surface Science
DOI: 10.1016/j.apsusc.2008.06.122

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