Nanomechanical properties of silicon surfaces nanostructured by excimer laser
Excimer laser irradiation at ambient temperature has been employed to produce nanostructured silicon surfaces. Nanoindentation was used to investigate the nanomechanical properties of the deformed surfaces as a function of laser parameters, such as the angle of incidence and number of laser pulses at a fixed laser fluence of 5 J cm-2. A single-crystal silicon  surface was severely damaged by laser irradiation and became nanocrystalline with an enhanced porosity. The resulting laser-treated...[Show more]
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|Source:||Science and Technology of Advanced Materials|
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