Mangalampalli, S.R.N. Kiran; Kumar, Prashant
Excimer laser irradiation at ambient temperature has been employed to produce nanostructured silicon surfaces. Nanoindentation was used to investigate the nanomechanical properties of the deformed surfaces as a function of laser parameters, such as the angle of incidence and number of laser pulses at a fixed laser fluence of 5 J cm-2. A single-crystal silicon  surface was severely damaged by laser irradiation and became nanocrystalline with an enhanced porosity. The resulting laser-treated...[Show more]
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