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Nanomechanical properties of silicon surfaces nanostructured by excimer laser

Mangalampalli, S.R.N. Kiran; Kumar, Prashant


Excimer laser irradiation at ambient temperature has been employed to produce nanostructured silicon surfaces. Nanoindentation was used to investigate the nanomechanical properties of the deformed surfaces as a function of laser parameters, such as the angle of incidence and number of laser pulses at a fixed laser fluence of 5 J cm-2. A single-crystal silicon [311] surface was severely damaged by laser irradiation and became nanocrystalline with an enhanced porosity. The resulting laser-treated...[Show more]

CollectionsANU Research Publications
Date published: 2010
Type: Journal article
Source: Science and Technology of Advanced Materials
DOI: 10.1088/1468-6996/11/2/025003


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