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Nanomechanical and optical properties of highly a-axis oriented AlN films

Jose, Feby; Ramaseshan, R.; Sundari, S. Tripura; Dash, S.K.; Tyagi, A.K.; Mangalampalli, S.R.N. Kiran; Ramamurty, U


This paper reports optical and nanomechanical properties of predominantly a-axis oriented AlN thin films. These films were deposited by reactive DC magnetron sputtering technique at an optimal target to substrate distance of 180 mm. X-ray rocking curve (FWHM = 52 arcsec) studies confirmed the preferred orientation. Spectroscopic ellipsometry revealed a refractive index of 1.93 at a wavelength of 546 nm. The hardness and elastic modulus of these films were 17 and 190 GPa, respectively, which are...[Show more]

CollectionsANU Research Publications
Date published: 2012
Type: Journal article
Source: Applied Physics Letters
DOI: 10.1063/1.4772204


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