Nanomechanical and optical properties of highly a-axis oriented AlN films
This paper reports optical and nanomechanical properties of predominantly a-axis oriented AlN thin films. These films were deposited by reactive DC magnetron sputtering technique at an optimal target to substrate distance of 180 mm. X-ray rocking curve (FWHM = 52 arcsec) studies confirmed the preferred orientation. Spectroscopic ellipsometry revealed a refractive index of 1.93 at a wavelength of 546 nm. The hardness and elastic modulus of these films were 17 and 190 GPa, respectively, which are...[Show more]
|Collections||ANU Research Publications|
|Source:||Applied Physics Letters|
|01_Jose_Nanomechanical_and_optical_2012.pdf||600.67 kB||Adobe PDF||Request a copy|
|02_Jose_Nanomechanical_and_optical_2012.pdf||615.01 kB||Adobe PDF||Request a copy|
Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.