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Structure and mechanical properties of TiC films deposited using combination of pulsed DC and normal DC magnetron co-sputtering

Thulasi Raman, K.H.; Mangalampalli, S.R.N. Kiran; Ramamurty, U; Rao, G. Mohan

Description

Titanium-carbon (TiC) thin films of different compositions were prepared by a combination of pulsed DC (for Ti target) and normal DC (for graphite target) magnetron co-sputtering on oxidized silicon and fused quartz substrates. At 33.7 at.% of C content,

CollectionsANU Research Publications
Date published: 2012
Type: Journal article
URI: http://hdl.handle.net/1885/66527
Source: Applied Surface Science
DOI: 10.1016/j.apsusc.2012.05.064

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