Skip navigation
Skip navigation

Single-step RIE fabrication process of low loss InP waveguide using CH 4 /H 2 chemistry

Lysevych, Mykhaylo; Karouta, Fouad; Jagadish, Chennupati; Tan, Hark Hoe

Description

Single-step C H4 / H2 -based reactive ion etching (RIE) process, without alternating O2 plasma treatment, has been developed with virtually no polymer buildup on the etched surface. InP ridge waveguides up to 1.9 μm high were etched without any mid- or p

dc.contributor.authorLysevych, Mykhaylo
dc.contributor.authorKarouta, Fouad
dc.contributor.authorJagadish, Chennupati
dc.contributor.authorTan, Hark Hoe
dc.date.accessioned2015-12-10T23:22:24Z
dc.identifier.issn0013-4651
dc.identifier.urihttp://hdl.handle.net/1885/66502
dc.description.abstractSingle-step C H4 / H2 -based reactive ion etching (RIE) process, without alternating O2 plasma treatment, has been developed with virtually no polymer buildup on the etched surface. InP ridge waveguides up to 1.9 μm high were etched without any mid- or p
dc.publisherElectrochemical Society Inc
dc.sourceJournal of the Electrochemical Society
dc.subjectKeywords: Etched surface; Fabrication process; InP; Low loss; Plasma treatment; Ridge waveguides; Root mean square roughness; Single-step; Waveguide propagation; Electric losses; Plasma applications; Waveguides; Reactive ion etching
dc.titleSingle-step RIE fabrication process of low loss InP waveguide using CH 4 /H 2 chemistry
dc.typeJournal article
local.description.notesImported from ARIES
local.identifier.citationvolume158
dc.date.issued2011
local.identifier.absfor020105 - General Relativity and Gravitational Waves
local.identifier.ariespublicationf2965xPUB1295
local.type.statusPublished Version
local.contributor.affiliationLysevych, Mykhaylo, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationTan, Hoe Hark, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationKarouta, Fouad, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationJagadish, Chennupati, College of Physical and Mathematical Sciences, ANU
local.description.embargo2037-12-31
local.bibliographicCitation.issue3
local.bibliographicCitation.startpageH281
local.bibliographicCitation.lastpageH284
local.identifier.doi10.1149/1.3532767
dc.date.updated2016-02-24T08:12:09Z
local.identifier.scopusID2-s2.0-79551576696
local.identifier.thomsonID000286677900079
CollectionsANU Research Publications

Download

File Description SizeFormat Image
01_Lysevych_Single-step_RIE_fabrication_2011.pdf947.26 kBAdobe PDF    Request a copy
02_Lysevych_Single-step_RIE_fabrication_2011.pdf280.62 kBAdobe PDF    Request a copy


Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.

Updated:  19 May 2020/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator