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Reactive biased target ion beam deposited W-DLC nanocomposite thin films - Microstructure and its mechanical properties

Bharathy, P. Vijai; Yang, Q.; Mangalampalli, S.R.N. Kiran; Rha, Jongloo; Nataraj, D.; Mangalaraj, D.


Tungsten incorporated diamond like carbon (W-DLC) nanocomposite thin films with variable fractions of tungsten were deposited by using reactive biased target ion beam deposition technique. The influence of tungsten incorporation on the microstructure, surface topography, mechanical and tribological properties of the DLC were studied using X-ray photoelectron spectroscopy (XPS), Raman spectroscopy, Atomic force microscope (AFM), transmission electron microscopy (TEM), nano-indentation and...[Show more]

CollectionsANU Research Publications
Date published: 2012
Type: Journal article
Source: Diamond and Related Materials
DOI: 10.1016/j.diamond.2011.12.016


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