Shahid, Naeem; Naureen, Shagufta; Li, Mingyu; Swillo, Marcin; Anand, S
We demonstrate that the side-wall profiles of high-aspect-ratio two-dimensional (2D) photonic crystals (PhCs) in InP-based materials can be made vertical by reshaping through annealing. The annealing reduces depth and shape irregularities which are inherent to the etch-process. The efficacy of the reshaping is demonstrated by comparing the optical properties of PhC waveguides having as-etched and reshaped PhC-hole geometries. Spectral characteristics of ministop-bands (MSBs), due to coupling of...[Show more]
Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.